TEUS-S product line
s100 |
0.05 |
100 |
1.5 |
25 |
60 |
100 |
5 |
>1year |
s200 |
0.05 |
200 |
1.5 |
50 |
60 |
200 |
10 |
>0.5year |
s400 |
0.05 |
400 |
1.5 |
100 |
60 |
400 |
20 |
>0.2year |
TEUS-M product line
M100 |
0.15 |
100 |
1.5 |
25 |
60 |
100 |
15 |
>1year |
M200 |
0.15 |
200 |
1.5 |
50 |
60 |
200 |
30 |
>0.5year |
M400 |
0.15 |
400 |
1.5 |
100 |
60 |
400 |
60 |
>0.2year |
All parameters are for in-band (13.5 nm ± 1%) radiation. Conversion efficiency for in-band radiation is 2%@2π. For full-band (13.5 nm ± 2%) conversion efficiency is 4%@2π, allowing to double brightness and the collected EUV power
*- at the plasma for different source sizes of 30-60um (where the higher brightness corresponds to the smaller spot size)
**- after collection mirror.
***- time of 10% loss of reflectivity
With the use of a replaceable membrane it is possible to prevent any particles from reaching the compartment which contains the reticle, pellicle and any sensitive elements