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TEUS - LPP EUV light source with high brightness and low debris

LPP EUV source is based on fast rotating liquid metal target. A novel LPP target with conventional debris mitigation techniques has resulted in an ultimate solution for a clean photon EUV source.

Description
TEUS RT 

Fast rotation target provides:

 -Redirection of droplet debris away from input (laser) and output  (EUV) windows

 -Undisturbed target surface for a high rep rate laser system (up to 1 MHz)

 -Minimum synchronisation required as the target is continuous

 -Excellent inherent source spatial stability

 

High Rotation speed: redirection of droplet debris.

High rotation speed allows drastic changes in angular velocity distribution for droplets with initial velocities comparable with linear velocity of the target (Key elements, general principles and techniques protected by granted patents)

TEUS PP

Demonstration of droplet mitigation effect due to high rotation speed.

TEUS DB

 

Specifications

TEUS-S product line

Actinic source TEUS EUV collection angle, sr  Laser average power, W Pulse duration, ns  Pulse frequency, kHz Plasma size, µm  Brightness*, W/mm2sr  EUV power**, mW Collector lifetime***, % 
 s100  0.05  100  1.5    25  60    110  5  >1year
 s200  0.05  200  1.5    50  60    220  10  >0.5year
 s400  0.05  400  1.5    100  60    450  20  >0.5year

TEUS-M product line

Actinic source TEUS EUV collection angle, sr  Laser average power, W Pulse duration, ns  Pulse frequency, kHz Plasma size, µm  Brightness*, W/mm2sr  EUV power**, mW Collector lifetime***, % 
 M100  0.15  100  1.5  25  60  110  15  >1year
 M200  0.15  200  1.5  50  60  220  30  >0.5year
 M400  0.15  400  1.5  100  60  450  60  >0.5year

All parameters are for in-band (13.5 nm ± 1%) radiation. Conversion efficiency for in-band radiation is 2%@2π. For full-band (13.5 nm ± 2%) conversion efficiency is 4%@2π, allowing to double brightness and the collected EUV power

*- at the plasma for different source sizes of 30-60um (where the higher brightness corresponds to the smaller spot size)
**- after collection mirror.
***- time of 10% loss of reflectivity

With the use of a replaceable membrane it is possible to prevent any particles from reaching the compartment which contains the reticle, pellicle and any  sensitive elements