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Powerful and flexible spectrometer, specially developed for EUV plasma characterization in a spectral range up to 40nm.

- Monochromator and spectrometer modes

- Constant angle of deviation

- Wavelength’s scan by a precise grating rotation

Description

VUV garzing incidence spectrometer-monochromator GISM

Features of design:

  • Monochromator and spectrometer modes;
  • Constant angle of deviation;
  • Wavelength’s scan by a precise grating rotation;
  • Micrometer driven entrance and exit slit assembly;
Specifications
  • Incidence angle: φ=85°
  • Diffraction angle: φ=81°
  • Constant angle of deviation: φ=φ±ψ=166°
  • Spectral range: 4–42.5nm
  • Replaceable diffraction gratings: 1200, 600, 300 G/mm
  • Spectrometer length: 250mm

Spectral range, dispersion and spectral resolution for the entrance slit of 20μm (by default):

Grating, G/mm Spectral range, nm Dispersion,  nm/mm Resolution, nm
1200 4.4-10.6 0.73-0.91 0.04
600 8.9-21.2 1.46-1.82 0.08
300 17.7-42.5 2.92 — 3.64 0.16