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Powerful and flexible spectrometer, specially developed for EUV plasma characterization in a spectral range up to 40nm.
- Monochromator and spectrometer modes
- Constant angle of deviation
- Wavelength’s scan by a precise grating rotation
VUV garzing incidence spectrometer-monochromator GISM
Features of design:
Spectral range, dispersion and spectral resolution for the entrance slit of 20μm (by default):