ISTEQ - VUV spectrometer GISM

Powerful and flexible spectrometer, specially developed for EUV plasma characterization in a spectral range up to 40nm.

- Monochromator and spectrometer modes

- Constant angle of deviation

- Wavelength’s scan by a precise grating rotation

Description

VUV garzing incidence spectrometer-monochromator GISM

Features of design:

Monochromator and spectrometer modes;
Constant angle of deviation;
Wavelength’s scan by a precise grating rotation;
Micrometer driven entrance and exit slit assembly;

Specifications

Incidence angle: φ=85°
Diffraction angle: φ=81°
Constant angle of deviation: φ=φ±ψ=166°
Spectral range: 4–42.5nm
Replaceable diffraction gratings: 1200, 600, 300 G/mm
Spectrometer length: 250mm

Spectral range, dispersion and spectral resolution for the entrance slit of 20μm (by default):

Grating, G/mm	Spectral range, nm	Dispersion, nm/mm	Resolution, nm
1200	4.4-10.6	0.73-0.91	0.04
600	8.9-21.2	1.46-1.82	0.08
300	17.7-42.5	2.92 — 3.64	0.16